Gas Chromatography for High-Purity Gas Impurity Analysis in Semiconductor Industry

Gas Chromatography in Semiconductor Industry

Author：JIANGXI AIYI HI-TECH CO., LTD. Click： Time：2025-10-23 15:51:33

Product Overview

Our AY-906 series gas chromatographs are designed for trace impurity analysis in high-purity gases used in semiconductor manufacturing and specialty gas production.

This system supports dual-detector configurations (TCD + HID/PDHID), multi-valve switching, and an ultra-clean sample flow path, ensuring accurate, stable, and reproducible detection at the ppb level.

Key Features:

Simultaneous monitoring of major and trace gases
Low-dead-volume stainless steel flow path
Modular column design for rapid component separation
Automated gas injection valve for precise and reproducible injection
IBrainChrom workstation for data acquisition and regulatory documentation

Gas Chromatography in the Semiconductor Industry: Ensuring Gas Purity and Process Stability

1. Introduction

Semiconductor manufacturing processes rely on ultra-high-purity gases (nitrogen, argon, hydrogen, helium, and oxygen) for wafer cleaning, deposition, and etching. Even sub-ppm impurities such as CO, CO₂, CH₄, H₂O, and O₂ can cause significant process deviations, surface contamination, or equipment failure.

To ensure gas quality and production stability, gas chromatography (GC) is the most effective and reliable analytical technique for trace impurity analysis.

2. Typical GC Configuration for High-Purity Gas Testing

GC systems used for semiconductor gas analysis typically include:

2.1 Detectors:

TCD (Thermal Conductivity Detector): Measure major components with high stability.

HID or PDHID (Helium Ionization Detector): Provides ultra-sensitive detection of impurities at the ppb level.

2.2 Columns:

Molecular sieve columns for permanent gas separations.

Porapak or capillary columns for CO, CO₂, and hydrocarbons.

2.3 Sampling System:

Automatic six-port or ten-port gas valve with fixed loop volume.

Stainless steel tubing and leak-proof fittings to prevent contamination.

2.4 Flow System:

Independent carrier gas line for precise flow control.

An optional backflush system extends column life and increases throughput.

This configuration allows simultaneous analysis of major gases and trace contaminants in a single run, improving efficiency and analytical reliability.

3. Main Applications

Gas chromatography systems are widely used in:
Semiconductor manufacturing plants for process gas purity control
Electronic material suppliers for high-purity gas quality certification
Specialty gas manufacturers for impurity detection in calibration and carrier gases
Laboratories studying gas purity and material surface interactions

4. Advantages of the AY-906 Semiconductor Gas Analysis System

Ultra-trace detection capability (down to ppb level)
Multi-valve automated sampling for a wide range of gas flows
High-temperature stability ensures long-term accuracy
Dual detector flexibility (TCD + HID) for complete compositional analysis
Seamless data processing with iBrainChrom software

5. Conclusion

In the semiconductor industry, gas purity is closely linked to product quality. By integrating an advanced TCD/HID gas chromatography system, researchers can ensure consistent, reliable, and compliant analytical results, safeguarding the quality of chip manufacturing.

Whether you're analyzing refinery gases, high-purity process gases, or specialty calibration gases, our AY-906 platform delivers the accuracy, sensitivity, and stability your process requires.

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Gas Chromatography in Semiconductor Industry

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